Rainer Behrisch,
Wolfgang Eckstein
Sputtering by Particle Bombardment
Experiments and Computer Calculations from Threshold to MeV Energies
Gebonden Engels 2007 9783540445005
Verwachte levertijd ongeveer 9 werkdagen
Samenvatting
This book provides a long-needed survey of new results. Especially welcome is a new summary of the measured and calculated sputtering yields with an algebraic approximation formula for the energy and angular dependence of the yields, which is useful for researchers who need sputtering yields for physics research or applied problems. The book offers a critical review of computational methods for calculating sputtering yields and also includes molecular dynamics calculations.
Specificaties
ISBN13:9783540445005
Taal:Engels
Bindwijze:gebonden
Uitgever:Springer Berlin Heidelberg
Lezersrecensies
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Inhoudsopgave
Introduction and Overview (R. Behrisch, W. Eckstein).- Computer Simulation of the Sputtering Process (W. Eckstein, H.M. Urbassek).- Sputtering Yields (W. Eckstein).- Results of Molecular Dynamics Calculations (H.M. Urbassek).- Energy and Angular Distributions of Sputtered Species (H. Gnaser).- Chemical Sputtering (W. Jacob, J. Roth).- Electronic Sputtering with Swift Heavy Ions (W. Assmann, M. Toulemonde, C. Trautmann) Subject Index
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